Direct Real-Time Determination of Compositional Profiles in Structured Materials Using Laser Ablation Instruments: LIBS and LA-ICP-MS

Publication Type

Conference Paper

Date Published



Laser ablation offers rapid micro-analysis with spatial resolution ~10 nm in depth, ~3 μm lateral. Structured materials are mapped, depth-profiled for elemental and isotopic composition using LIBS or LA-ICP-MS without dissolving samples. Molecular structure can be inferred by chemometric processing.

Conference Name

Applied Industrial Optics: Spectroscopy, Imaging and Metrology

Year of Publication



Optical Society of America

Conference Location

Monterey, CA