Plasma Development During Picosecond Laser Processing of Electronic Materials

Publication Type

Journal Article

Date Published

08/2000

LBNL Report Number

LBNL-48386

Abstract

Lasers with picosecond and shorter pulse duration are receiving much attention due to their capabilities for direct-write micromachining on most materials with minimal lateral damage. Deposition of energy from lasers of large power density inevitably creates plasmas that often shield the target and reduce material processing efficiency. Nevertheless, there is little knowledge on the formation and subsequent evolution of plasmas during laser processing of materials at the picosecond time scale. Such information is essential for precise control of laser energy coupling with target materials, particularly for machining at microscale depth.

Journal

Journal of Heat Transfer-Transactions of the ASME

Volume

122

Year of Publication

2000

Short Title

J. Heat Transfer

Pagination

424-424

Issue

3