Publications
Publications by Category
X Author: Paolo A Gargini
2019
Stern, Rebecca D, Danielle C Hutchison, Morgan R Olsen, Lev N Zakharov, May Nyman, Kristin A Persson, Kurt G Ronse, Paolo A Gargini, Patrick P Naulleau, and Toshiro Itani."Alkyltin Keggin clusters as EUVL photoresist technology."International Conference on Extreme Ultraviolet Lithography 2019International Conference on Extreme Ultraviolet Lithography 2019
(2019). DOI